|
|
 |
|
  |
|
WORLD-WIDE QUALITY
CERTIFICATIONS |
|
| |
|
|
|
| |
 |
| |
OLED
/ PLED UV Cleaning
The MBRAUN MB-UV-O3 is an
integrated system for UV-Ozone cleaning of semiconductor
and optical surfaces, providing a clean hydrocarbon-free
surface which significantly improves thin film and UV-resin
adhesion. The simultaneous application of ozone and UV
light is highly effective in removing residual organic
and carbon contamination.
The MBRAUN MB-UV-O3 Cleaning
System is a bench top system with a sealed cleaning chamber
and can accommodate samples up to 165 mm x 165 mm x 10
mm thick. For smooth, easy sample loading and unloading
the substrate to be cleaned is placed on PEEK pins which
are located on a hard coated aluminum plate. A timer set
and display feature allows timing of the cleaning process
from 1-999.9 minutes. An audible alarm sounds periodically
upon completion of the cleaning process. Safety interlocks
are provided to shut off the UV radiation if the door
is opened or the exhaust is interrupted.
The irradiation chamber is sealed during operation, with
an oxygen gas inlet and an ozone vent providing complete
isolation of the ozone from the inert atmosphere. The
closed chamber is class-10 clean room compatible and provides
a clean, particle-free environment for the sample during
irradiation. A 0-10 SLPM flow meter is used to control
the oxygen flow during the cleaning process. The oxygen
flow is automatically shut off after termination of the
process. The entire equipment is available as a stand-alone
version or integrated into an MBRAUN
glovebox. Automatic loading and unloading is available
upon request.
 |
|
MBraun
Incorporated • USA • info@mbraunusa.com
• 603-773-9333 |
|
|
