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MBRAUN USA OLED
Thin Film Deposition (TFD) - Evaporator
Systems
MBRAUN
thin film deposition systems
are engineered for use in
university research, as well as in
large-scale industrial applications. We
offer both standard and custom thin film
deposition systems.
Building
multi-layer thin film layers requires
pure atmospheric conditions (<1 ppm of
Oxygen and moisture), and that fine
particles are removed quickly, reliably
and continuously.
MBRAUN OLED/PLED
thin film evaporator gloveboxes have
been designed for the deposition of
multilayer thin films; without
disturbing intermediate layers caused by physi, or chemi-sorption.
MBRAUN
thin film deposition systems and
components are highly reliable
systems that routinely achieve
coating uniformities of <5% in
semiconductor device fabrication
applications. Product configurations
range from stand-alone bell jars to
automatic loading systems in
gloveboxes for the coating of wafers
(and other applications) ranging in
size from 2" to 300mm.
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Integrated
Thin Film
Deposition (TFD)
Evaporator
Systems |
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Spincoater
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MB EVAP
Specifications |
Deposition
Tool with
OLED Sources |
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Glove box
integrated
deposition
systems
include:
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MBRAUN
inert
glove
boxes
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Multi-source
thermal
deposition
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RF or DC
sputtering,
E-beam
options
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500mm
vacuum
chamber
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Bell jar
options
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Turbo
molecular
pump
stacks
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Cryogenic
pump
stacks
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Rate &
thickness
monitoring
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Substrate
heating,
cooling
&
rotation
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Source &
substrate
shutters
View Data
Sheet |
Request
additional
information |
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Stand Alone
Thin Film
Deposition (TFD)
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MB EVAP S/A
Specifications |
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The MB-EVAP
S/A vacuum
deposition
system is a
high
quality,
stand alone,
research &
development
tool
designed for
all of your
thin film
requirements.
The M.E.S.A.
system comes
standard as
a 2 to 4
resistive
source
system with
the
capability
to deposit
in sequence
or
simultaneously
and can also
be
configured
to include
RF or DC
sputter
sources as
well as
e-beam
sources. Our
design
incorporates
many of the
high quality
components
used by
similar
suppliers
while still
allowing
MBRAUN to offer our
systems at a
cost
competitive
price.
MBRAUN can
configure
the M.E.S.A.
system to
meet your
exact
requirements
in addition
to offering
a system
designed for
easy
integration
to an
MBRAUN inert
atmosphere
glovebox
system.
Please
contact
MBRAUN for more
information
on this
product.
Options
include:
-
2 to 4
resistive
sources
-
RF or DC
sputtering
-
E-beam
sources
-
500mm
vacuum
chamber
-
Turbo
molecular
pump
stacks
-
Cryogenic
pump
stacks
-
Rate &
thickness
monitoring
-
Substrate
heating
&
cooling
-
Substrate
rotation
-
Source &
substrate
shutters
View Data
Sheet |
Request
additional
information |
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Evaporator
Components
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Evaporator Module
Click image for larger picture
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Stainless Steel Bell Jar
Click image for larger picture
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Evaporator System Chamber Door
Click image for larger picture
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